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Effect of pulse voltage slew rate on the uniformity of poly..:

, In: 2022 IEEE Conference on Electrical Insulation and Dielectric Phenomena (CEIDP),
Li, Shuhao ; Ding, Yanbo ; Zhao, Yulei... - p. 538-541 , 2022
Link: https://doi.org/10.1109/CEIDP55452.2022.9985297