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1 Ergebnisse
1
Fabrication of Uniform Nanoscale Cavities via Silicon Direc..
JoVE : Engineering
Thomson, Stephen R. D.
;
Perron, Justin K.
;
Kimball, Mark O.
.. , 2014
Link:
https://www.jove.com/t/51179
RT T1
Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
UL https://suche.suub.uni-bremen.de/peid=jove-51179&Exemplar=1&LAN=DE A1 Thomson, Stephen R. D. A1 Perron, Justin K. A1 Kimball, Mark O. A1 Mehta, Sarabjit A1 Gasparini, Francis M. PB JoVE YR 2014 T3 JoVE : Engineering K1 Physics K1 silicon direct wafer bonding K1 nanoscale K1 bonded wafers K1 silicon wafer K1 confined liquids K1 lithographic techniques LK http://dx.doi.org/https://www.jove.com/t/51179 DO https://www.jove.com/t/51179 SF ELIB - SuUB Bremen
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