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1 Ergebnisse
1
Single-Digit Nanometer Electron-Beam Lithography with an Ab..
JoVE : Engineering
Camino, Fernando E.
;
Manfrinato, Vitor R.
;
Stein, Aaron
... , 2018
Link:
https://www.jove.com/t/58272
RT T1
Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
UL https://suche.suub.uni-bremen.de/peid=jove-58272&Exemplar=1&LAN=DE A1 Camino, Fernando E. A1 Manfrinato, Vitor R. A1 Stein, Aaron A1 Zhang, Lihua A1 Lu, Ming A1 Stach, Eric A. A1 Black, Charles T. PB JoVE YR 2018 T3 JoVE : Engineering K1 Nanofabrication K1 electron-beam lithography K1 aberration correction K1 electron microscopy K1 nanomaterials K1 pattern transfer K1 e-beam resist K1 poly (methyl methacrylate) K1 hydrogen silsesquioxane K1 tmij LK http://dx.doi.org/https://www.jove.com/t/58272 DO https://www.jove.com/t/58272 SF ELIB - SuUB Bremen
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