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Effects of Unique Ion Chemistry on Thin-Film Growth by Plas..:
Muthu B. J. Wijesundara
;
Hanley, Luke
;
Ni, Boris
.
Proceedings of the National Academy of Sciences of the United States of America. 97 (2000) 1 - p. 23-27 , 2000
Link:
https://www.jstor.org/stable/121736
RT Journal T1 <Title>Effects of Unique Ion Chemistry on Thin-Film Growth by Plasma-Surface Interactions</Title> UL https://suche.suub.uni-bremen.de/peid=jstor-121736&Exemplar=1&LAN=DE A1 Muthu B. J. Wijesundara A1 Hanley, Luke A1 Ni, Boris A1 Sinnott, Susan B. PB National Academy of Sciences of the United States of America YR 2000 SN 0027-8424 K1 Chemistry K1 Physical sciences K1 Physics K1 Microphysics K1 Atomic physics K1 Atoms K1 Ions K1 Applied sciences K1 Materials science K1 Materials K1 Material films K1 Energy K1 Kinetic energy K1 Chemical compounds K1 Chemicals K1 Polymers K1 Halogen compounds K1 Fluorine compounds K1 Fluorocarbons K1 Chemical elements K1 Nonmetals K1 Carbon K1 Chemical properties K1 Reactivity K1 Carbon compounds K1 Hydrocarbons JF Proceedings of the National Academy of Sciences of the United States of America VO 97 IS 1 SP 23 OP 27 LK http://dx.doi.org/https://www.jstor.org/stable/121736 DO https://www.jstor.org/stable/121736 SF ELIB - SuUB Bremen
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