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1 Ergebnisse
1
Resonant MEMS: fundamentals, implementation and application
Advanced micro and nanosystems
Brand, Oliver
;
Dufour, Isabelle
;
Heinrich, Stephen M
. , 2015
Link:
https://onlinelibrary.wiley.com/doi/book/10.1002/97835..
RT T1
Resonant MEMS: fundamentals, implementation and application
UL https://suche.suub.uni-bremen.de/peid=wiley-ubcm-908335689&Exemplar=1&LAN=DE A1 Brand, Oliver A1 Dufour, Isabelle A1 Heinrich, Stephen M A1 Josse, Fabien PB Wiley-VCH Verlag & Co. KGaA YR 2015 T3 Advanced micro and nanosystems SN 9783527676361 SN 3527676368 SN 9783527676354 SN 352767635X SN 9783527676347 SN 3527676341 SN 9783527676330 SN 3527676333 SN 3527335455 SN 9783527335459 K1 Microelectromechanical systems K1 Microfabrication K1 Resonance K1 Résonance K1 resonance (acoustics concept) K1 TECHNOLOGY & ENGINEERING K1 Design and construction K1 Electronics K1 Digital K1 Microelectronics LK http://dx.doi.org/https://onlinelibrary.wiley.com/doi/book/10.1002/9783527676330 DO https://onlinelibrary.wiley.com/doi/book/10.1002/9783527676330 SF ELIB - SuUB Bremen
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