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Fabrication of high aspect ratio grooves on aluminium nitri..:
Chen, Ni
;
Liu, Jiawei
;
He, Ning
...
Journal of Materials Processing Technology. 325 (2024) - p. 118299 , 2024
Link:
https://doi.org/10.1016/j.jmatprotec.2024.118299
RT Journal T1 <Title>Fabrication of high aspect ratio grooves on aluminium nitride by laser and chemical milling enhanced micro milling</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jmatprotec.2024.118299&Exemplar=1&LAN=DE A1 Chen, Ni A1 Liu, Jiawei A1 He, Ning A1 Xiao, Xingzhi A1 Zhao, Junyi A1 Jia, Yibo A1 Yu, Nan PB Elsevier BV YR 2024 SN 0924-0136 JF Journal of Materials Processing Technology VO 325 SP 118299 LK http://dx.doi.org/https://doi.org/10.1016/j.jmatprotec.2024.118299 DO https://doi.org/10.1016/j.jmatprotec.2024.118299 SF ELIB - SuUB Bremen
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