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1 Ergebnisse
1
A Realizable Overlay Virtual Metrology System in Semiconduc..:
Tin, Tze Chiang
;
Tan, Saw Chin
;
Yong, Hing
...
IEEE Access. 9 (2021) - p. 65418-65439 , 2021
Link:
https://doi.org/10.1109/access.2021.3076193
RT Journal T1
A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_access.2021.3076193&Exemplar=1&LAN=DE A1 Tin, Tze Chiang A1 Tan, Saw Chin A1 Yong, Hing A1 Kim, Jimmy Ook Hyun A1 Teo, Eric Ken Yong A1 Lee, Ching Kwang A1 Than, Peter A1 Tan, Angela Pei San A1 Phang, Siew Chee PB Institute of Electrical and Electronics Engineers (IEEE) YR 2021 SN 2169-3536 JF IEEE Access VO 9 SP 65418 OP 65439 LK http://dx.doi.org/https://doi.org/10.1109/access.2021.3076193 DO https://doi.org/10.1109/access.2021.3076193 SF ELIB - SuUB Bremen
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