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1 Ergebnisse
1
The Implementation of a Smart Sampling Scheme C2O Utilizing..:
Tin, Tze Chiang
;
Tan, Saw Chin
;
Yong, Hing
...
IEEE Access. 9 (2021) - p. 114255-114266 , 2021
Link:
https://doi.org/10.1109/access.2021.3103235
RT Journal T1
The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_access.2021.3103235&Exemplar=1&LAN=DE A1 Tin, Tze Chiang A1 Tan, Saw Chin A1 Yong, Hing A1 Kim, Jimmy Ook Hyun A1 Teo, Eric Ken Yong A1 Wong, Joanne Ching Yee A1 Lee, Ching Kwang A1 Than, Peter A1 Tan, Angela Pei San A1 Phang, Siew Chee PB Institute of Electrical and Electronics Engineers (IEEE) YR 2021 SN 2169-3536 JF IEEE Access VO 9 SP 114255 OP 114266 LK http://dx.doi.org/https://doi.org/10.1109/access.2021.3103235 DO https://doi.org/10.1109/access.2021.3103235 SF ELIB - SuUB Bremen
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